Shin tushen granite zai iya kawar da damuwa mai zafi don kayan aikin marufi na wafer.

A cikin tsari mai tsari mai rikitarwa na kera semiconductor na marufi na wafer, damuwar zafi tana kama da "mai lalata" wanda aka ɓoye a cikin duhu, yana ci gaba da barazana ga ingancin marufi da aikin kwakwalwan kwamfuta. Daga bambancin ma'aunin faɗaɗa zafi tsakanin kwakwalwan kwamfuta da kayan marufi zuwa ga canjin zafin jiki mai tsanani yayin aikin marufi, hanyoyin samar da damuwar zafi sun bambanta, amma duk suna nuna sakamakon rage yawan amfanin ƙasa da kuma shafar amincin kwakwalwan kwamfuta na dogon lokaci. Tushen granite, tare da halayen kayansa na musamman, yana zama "mataimaki" mai ƙarfi a hankali wajen magance matsalar damuwar zafi.
Matsalar damuwa ta zafi a cikin marufi na wafer
Marufin Wafer ya ƙunshi haɗin gwiwa na kayan aiki da yawa. Kwakwalwa yawanci suna ƙunshe da kayan semiconductor kamar silicon, yayin da kayan marufi kamar kayan marufi na filastik da substrates sun bambanta a inganci. Lokacin da zafin jiki ya canza yayin aikin marufi, kayan aiki daban-daban sun bambanta sosai a matakin faɗaɗa zafi da matsewa saboda manyan bambance-bambance a cikin marufi na faɗaɗa zafi (CTE). Misali, ma'aunin faɗaɗa zafi na kwakwalwar silicon yana da kusan 2.6×10⁻⁶/℃, yayin da ma'aunin faɗaɗa zafi na kayan marufi na epoxy resin na yau da kullun yana da girma har zuwa 15-20 ×10⁻⁶/℃. Wannan babban gibi yana sa matakin raguwar guntu da kayan marufi su zama marasa daidaituwa a lokacin sanyaya bayan marufi, yana haifar da matsin lamba mai ƙarfi a mahaɗin da ke tsakanin su biyun. A ƙarƙashin ci gaba da tasirin damuwa na zafi, wafer na iya karkacewa da lalacewa. A cikin mawuyacin hali, yana iya haifar da lahani masu kisa kamar fasa guntu, karyewar haɗin gwiwa na solder, da kuma wargajewar mahaɗin, wanda ke haifar da lalacewar aikin wutar lantarki na guntu da raguwa mai mahimmanci a cikin rayuwar sabis. A cewar kididdigar masana'antu, matsalar da ke tattare da marufi da wafer da matsalolin damuwa na zafi ke haifarwa na iya kaiwa kashi 10% zuwa 15%, wanda hakan ke zama babban abin da ke takaita ci gaban masana'antar semiconductor mai inganci da inganci.

Fa'idodin halayen sansanonin dutse
Ƙarancin yawan faɗaɗa zafi: Granite ya ƙunshi lu'ulu'u na ma'adinai kamar quartz da feldspar, kuma yawan faɗaɗa zafi yana da ƙasa sosai, gabaɗaya yana farawa daga 0.6 zuwa 5 × 10⁻⁶/℃, wanda ya fi kusa da na guntun silicon. Wannan halayyar tana ba da damar cewa a lokacin aikin kayan aikin marufi na wafer, koda lokacin da ake fuskantar canjin zafin jiki, bambancin faɗaɗa zafi tsakanin tushen granite da guntu da kayan marufi yana raguwa sosai. Misali, lokacin da zafin jiki ya canza da 10℃, bambancin girman dandamalin marufi da aka gina akan tushen granite zai iya raguwa da fiye da 80% idan aka kwatanta da tushen ƙarfe na gargajiya, wanda ke rage damuwa ta zafi da faɗaɗa zafi da marufi na asynchronous ke haifarwa, kuma yana ba da yanayi mai ƙarfi ga wafer.
Kyakkyawan kwanciyar hankali na zafi: Granite yana da kyakkyawan kwanciyar hankali na zafi. Tsarinsa na ciki yana da yawa, kuma lu'ulu'u suna da alaƙa ta hanyar haɗin ionic da covalent, wanda ke ba da damar jigilar zafi a hankali a ciki. Lokacin da kayan aikin marufi ke fuskantar zagayen zafin jiki mai rikitarwa, tushen granite zai iya danne tasirin canje-canjen zafin jiki akan kansa kuma ya kula da filin zafin da ke da kwanciyar hankali. Gwaje-gwajen da suka dace sun nuna cewa a ƙarƙashin yawan canjin zafin jiki na kayan aikin marufi (kamar ±5℃ a minti ɗaya), ana iya sarrafa bambancin zafin jiki na saman tushen granite a cikin ±0.1℃, guje wa abin da ke faruwa na yawan damuwa na zafi da bambance-bambancen zafin gida ke haifarwa, tabbatar da cewa wafer ɗin yana cikin yanayin zafi iri ɗaya da kwanciyar hankali a duk lokacin aikin marufi, da kuma rage tushen samar da damuwa na zafi.
Babban tauri da rage girgiza: A lokacin aikin kayan aikin marufi na wafer, sassan motsi na injiniya a ciki (kamar injina, na'urorin watsawa, da sauransu) za su haifar da girgiza. Idan aka aika waɗannan girgizar zuwa wafer, za su ƙara ta'azzara lalacewar da matsin zafi ke haifarwa ga wafer ɗin. Tushen granite suna da ƙarfi da tauri fiye da na kayan ƙarfe da yawa, waɗanda za su iya tsayayya da tsangwama na girgizar waje yadda ya kamata. A halin yanzu, tsarin cikinsa na musamman yana ba shi kyakkyawan aikin rage girgiza kuma yana ba shi damar kawar da kuzarin girgiza cikin sauri. Bayanan bincike sun nuna cewa tushen granite na iya rage girgiza mai yawa (100-1000Hz) wanda aikin kayan marufi ya samar da kashi 60% zuwa 80%, wanda hakan ke rage tasirin haɗakar girgiza da damuwa ta zafi sosai, da kuma tabbatar da ingantaccen daidaito da amincin marufi na wafer.
Tasirin aikace-aikace na aiki
A cikin layin samar da marufi na wafer na wani sanannen kamfanin kera semiconductor, bayan gabatar da kayan aikin marufi tare da tushen granite, an sami nasarori masu ban mamaki. Dangane da nazarin bayanan dubawa na wafers 10,000 bayan marufi, kafin a ɗauki tushen granite, ƙimar lalacewar wafer warping da matsin lamba na zafi ya haifar ya kai kashi 12%. Duk da haka, bayan canzawa zuwa tushen granite, ƙimar lahani ta ragu sosai zuwa cikin kashi 3%, kuma ƙimar yawan amfanin ƙasa ta inganta sosai. Bugu da ƙari, gwaje-gwajen aminci na dogon lokaci sun nuna cewa bayan zagayowar zafi mai zafi 1,000 (125℃) da ƙarancin zafin jiki (-55℃), adadin gazawar haɗin gwiwa na solder na guntu bisa ga kunshin tushen granite ya ragu da kashi 70% idan aka kwatanta da kunshin tushe na gargajiya, kuma an inganta kwanciyar hankali na guntu sosai.

Yayin da fasahar semiconductor ke ci gaba da ci gaba zuwa ga daidaito mafi girma da ƙaramin girma, buƙatun kula da damuwa na zafi a cikin marufi na wafer suna ƙara zama masu tsauri. Tushen dutse, tare da fa'idodinsu gabaɗaya a cikin ƙarancin ƙimar faɗaɗa zafi, kwanciyar hankali na zafi da rage girgiza, sun zama babban zaɓi don inganta ingancin marufi na wafer da rage tasirin damuwa na zafi. Suna taka muhimmiyar rawa wajen tabbatar da ci gaban masana'antar semiconductor mai ɗorewa.