Hanyoyin ganowa don daidaita dandamalin daidaiton granite.

A fannin kera daidai gwargwado da binciken kimiyya, daidaiton dandamalin daidaiton dutse babban alama ne don tabbatar da daidaiton kayan aiki. Ga cikakken bayani game da hanyoyin gano abubuwa da yawa da kuma hanyoyin aiki a gare ku.
I. Hanyar Gano Laser interferometer
Injin auna zafin jiki na laser shine kayan aiki da aka fi so don gano madaidaicin lanƙwasa. Yi amfani da na'urar auna zafin jiki ta laser ZYGO GPI XP a matsayin misali, ƙudurinsa na iya kaiwa 0.1nm. Lokacin gudanar da ganowa, da farko daidaita tushen hasken interferometer ɗin da dandamalin kuma raba saman dandamalin zuwa yankunan grid na 50mm × 50mm. Daga baya, an tattara bayanan tsangwama daga gefe zuwa gefe, kuma an haɗa bayanan kuma an yi nazari ta amfani da polynomial na Zernike don samun kuskuren lanƙwasa. Wannan hanyar ta shafi dandamali masu daidaito kuma tana iya gano kurakuran lanƙwasa na ≤0.5μm/m². Ana amfani da ita sosai wajen gano injunan photolithography da dandamalin injunan aunawa masu daidaitawa uku.
Ii. Hanyar Jerin Matakan Lantarki
Gano jerin matakan lantarki yana da sauƙin aiki kuma yana da inganci sosai. An zaɓi matakin lantarki na TESA A2 (tare da ƙuduri na 0.01μm/m) kuma an shirya shi a cikin jeri na 9 × 9 tare da alkiblar X/Y na dandamalin. Ta hanyar tattara bayanan karkata na kowane mataki tare sannan amfani da hanyar murabba'i mafi ƙarancin don lissafi, ana iya samun ƙimar lanƙwasa daidai. Wannan hanyar za ta iya gano yanayin lanƙwasa na gida da lanƙwasa na dandamalin yadda ya kamata. Misali, ana iya gano canjin 0.2μm a cikin kewayon 50mm, wanda ya dace da gano sauri a cikin samar da taro.
Iii. Hanyar lu'ulu'u mai faɗi ta gani
Hanyar lu'ulu'u mai faɗi ta gani ta dace da gano ƙananan dandamali na yanki. Haɗa lu'ulu'u mai faɗi ta gani sosai a saman don a gwada shi a kan dandamalin kuma ku lura da gefunan tsangwama da aka yi a tsakaninsu a ƙarƙashin hasken tushen haske mai kama da monochromatic (kamar fitilar sodium). Idan layukan suna madaidaiciya madaidaiciya, yana nuna kyakkyawan lanƙwasa. Idan layukan lanƙwasa suka bayyana, ƙididdige kuskuren lanƙwasa bisa ga matakin lanƙwasa layi. Kowane layi mai lanƙwasa yana wakiltar bambancin tsayi na 0.316μm, kuma ana iya samun bayanan lanƙwasa ta hanyar sauyawa mai sauƙi.
Hudu. Hanyar duba na'urar aunawa mai daidaitawa uku
Injin aunawa mai daidaitawa uku zai iya cimma ma'auni mai inganci a sarari mai girma uku. Sanya dandamalin granite akan teburin aiki na injin aunawa kuma yi amfani da na'urar bincike don tattara bayanai daga wurare da yawa na aunawa a saman dandamalin. Tsarin injin aunawa yana sarrafawa da kuma nazarin waɗannan bayanai don samar da rahoton lanƙwasa na dandamalin. Wannan hanyar ba wai kawai za ta iya gano lanƙwasa ba, har ma da samun wasu sigogi na geometric na dandamalin a lokaci guda, kuma ta dace da cikakken gano manyan dandamalin granite.
Kwarewa a waɗannan hanyoyin ganowa zai iya taimaka maka wajen tantance daidai matakin da ke kan dandamalin daidaiton granite da kuma samar da garanti mai inganci don ingantaccen aikin kayan aiki.