Juyin Juyin Halitta a masana'antar semiconductor: Lokacin da granite ya hadu da fasahar micron
1.1 Binciken da ba a zata ba a kimiyyar kayan aiki
Dangane da rahoton 2023 SEMI International Semiconductor Association, kashi 63% na ci-gaba a duniya sun fara amfani da sansanonin granite maimakon dandamalin ƙarfe na gargajiya. Wannan dutse na halitta, wanda ya samo asali daga maƙarƙashiya mai zurfi a cikin ƙasa, yana sake rubuta tarihin masana'anta na semiconductor saboda abubuwan da ke cikin jiki na musamman:
Thermal inertia amfani: thermal fadada coefficient na granite 4.5 × 10⁻⁶ / ℃ ne kawai 1/5 na cewa na bakin karfe, da girma kwanciyar hankali na ± 0.001mm aka kiyaye a cikin ci gaba da aikin na lithography inji.
Siffofin dasawa da jijjiga: madaidaicin juzu'i na ciki ya ninka na simintin ƙarfe sau 15 sama da na baƙin ƙarfe, yana ɗaukar ƙayyadaddun ƙayyadaddun kayan aiki yadda ya kamata.
Yanayin magnetization na sifili: gaba ɗaya kawar da kuskuren maganadisu a ma'aunin laser
1.2 Tafiya ta metamorphosis daga nawa zuwa fab
Ɗaukar tushen samar da fasaha na ZHHIMG a Shandong a matsayin misali, ɗan ƙaramin granite yana buƙatar sha:
Ultra-daidaici machining: biyar-axis linkage machining cibiyar na 200 hours na ci gaba da niƙa, surface roughness har zuwa Ra0.008μm
Maganin tsufa na wucin gadi: sa'o'i 48 na sakin danniya na dabi'a a cikin madaidaicin yanayin zafin jiki da zaman bita, wanda ke inganta zaman lafiyar samfurin da 40%
Na biyu, fashe daidaitattun matsalolin shida na masana'antar semiconductor "maganin dutse"
2.1 Tsarin rage rarrabuwar kawuna
Zanga-zangar shari'a: Bayan guntuwar guntu a Jamus ta ɗauki dandali mai yawo da iskar gas:
| Wafer diamita | guntu kudi rage | flatness inganta |
| 12 inci | 67% | ≤0.001mm |
| 18 inci | 82% | ≤0.0005mm |
2.2 Tsare-tsare daidaitattun daidaito na lithographic
Tsarin ramuwa na zafin jiki: na'urar firikwensin yumbu da aka saka yana lura da canjin siffa a ainihin lokacin kuma yana daidaita yanayin dandali ta atomatik.
Bayanan da aka auna: ƙarƙashin jujjuyawar 28℃±5℃, daidaiton haɗawa yana jujjuyawa ƙasa da 0.12μm
Lokacin aikawa: Maris 24-2025