Fahimtar "ƙarfin dutse" da ke bayan masana'antar semiconductor - Ta yaya sassan daidaiton granite za su iya sake tsara iyakar daidaiton kera guntu?

Juyin Juya Halin da Aka Yi a Masana'antar Semiconductor: Lokacin da granite ya haɗu da fasahar micron
1.1 Abubuwan da ba a zata ba a kimiyyar kayan aiki
A cewar rahoton ƙungiyar Semiconductor ta ƙasa da ƙasa ta SEMI ta shekarar 2023, kashi 63% na masana'antun zamani na duniya sun fara amfani da tushen granite maimakon dandamalin ƙarfe na gargajiya. Wannan dutse na halitta, wanda ya samo asali daga magma condensation a cikin ƙasa, yana sake rubuta tarihin ƙera semiconductor saboda keɓantattun halayensa na zahiri:

Amfanin inertia na zafi: ma'aunin faɗaɗa zafi na granite 4.5×10⁻⁶/℃ shine 1/5 kawai na bakin karfe, kuma ana kiyaye daidaiton girma na ±0.001mm a cikin aikin injin lithography na ci gaba.

Halayen damping na girgiza: ma'aunin gogayya na ciki ya ninka na ƙarfen siminti sau 15, yana ɗaukar kayan aiki yadda ya kamata ta hanyar amfani da micro-vibration.

Sifili yanayin maganadisu: kawar da kuskuren maganadisu gaba ɗaya a cikin ma'aunin laser

1.2 Tafiyar canji daga nawa zuwa na zamani
Idan aka ɗauki tushen samar da kayayyaki na ZHHIMG a Shandong a matsayin misali, dole ne a yi amfani da wani yanki na dutse mai ɗanɗano:

Injin da aka yi daidai sosai: cibiyar injin haɗin kai mai kusurwa biyar don awanni 200 na niƙa mai ci gaba, ƙazanta a saman har zuwa Ra0.008μm

Maganin tsufa na wucin gadi: Sa'o'i 48 na sakin damuwa na halitta a cikin bitar zafin jiki da danshi akai-akai, wanda ke inganta kwanciyar hankali na samfurin da kashi 40%
Na biyu, warware matsaloli shida na daidaito na kera semiconductor "mafita ta dutse"
2.1 Tsarin rage saurin rarrabuwar Wafer

Gwaji: Bayan wani kamfanin sarrafa guntu a Jamus ya rungumi tsarin granite mai amfani da iskar gas:

Diamita na Wafer	Rage ƙimar guntu	inganta lanƙwasa
Inci 12	kashi 67%	≤0.001mm
inci 18	Kashi 82%	≤0.0005mm

2.2 Tsarin cimma daidaiton daidaiton daidaiton lithographic

Tsarin diyya na zafin jiki: firikwensin yumbu mai haɗawa yana lura da canjin siffar a ainihin lokacin kuma yana daidaita karkacewar dandamali ta atomatik
Bayanan da aka auna: a ƙarƙashin canjin 28℃±5℃, daidaiton sakawa yana canzawa ƙasa da 0.12μm