♦Alumina (Al2O3)
Madaidaicin sassan yumbu da aka samar ta ZhongHui Intelligent Manufacturing Group (ZHHIMG) ana iya yin su da albarkatun yumbu masu tsabta, 92 ~ 97% alumina, 99.5% alumina,> 99.9% alumina, da CIP sanyi isostatic latsawa.Matsakaicin zafin jiki da mashin ɗin daidaitaccen mashin, daidaiton girman ± 0.001mm, santsi har zuwa Ra0.1, yi amfani da zafin jiki har zuwa digiri 1600.Za a iya yin launuka daban-daban na yumbu bisa ga bukatun abokan ciniki, kamar: baki, fari, m, ja duhu, da dai sauransu. Madaidaicin sassan yumbu da aka samar da kamfaninmu suna da tsayayya ga babban zafin jiki, lalata, lalacewa da kuma rufi, kuma yana iya zama. da aka yi amfani da shi na dogon lokaci a cikin yanayin zafi mai zafi, vacuum da gurɓataccen iskar gas.
An yi amfani da shi sosai a cikin nau'ikan samar da kayan aikin semiconductor: Frames (bangaren yumbu), Substrate (tushe), Arm / Bridge(manipulator), Abubuwan Injin Injiniya da Ƙarƙashin Jirgin Sama.
| Sunan samfur | Babban Tsabta 99 Alumina Ceramic Square Tube / Bututu / Sanda | |||||
| Fihirisa | Naúrar | 85% Al2O3 | 95% Al2O3 | 99% Al2O3 | 99.5% Al2O3 | |
| Yawan yawa | g/cm3 | 3.3 | 3.65 | 3.8 | 3.9 | |
| Shakar Ruwa | % | <0.1 | <0.1 | 0 | 0 | |
| Sintered Zazzabi | ℃ | 1620 | 1650 | 1800 | 1800 | |
| Tauri | Mohs | 7 | 9 | 9 | 9 | |
| Ƙarfin Lankwasa (20 ℃)) | Mpa | 200 | 300 | 340 | 360 | |
| Ƙarfin Ƙarfi | Kgf/cm2 | 10000 | 25000 | 30000 | 30000 | |
| Tsawon Lokacin Aiki Zazzabi | ℃ | 1350 | 1400 | 1600 | 1650 | |
| Max.Yanayin Aiki | ℃ | 1450 | 1600 | 1800 | 1800 | |
| Juyin Juriya | 20 ℃ | Ω.cm3 | > 1013 | > 1013 | > 1013 | > 1013 |
| 100 ℃ | 1012-1013 | 1012-1013 | 1012-1013 | 1012-1013 | ||
| 300 ℃ | >109 | > 1010 | > 1012 | > 1012 | ||
Aikace-aikacen yumbu na alumina mai tsabta:
1. Aiwatar da kayan aiki na semiconductor: yumbu vacuum chuck, yankan diski, diski mai tsaftacewa, yumbu CHUCK.
2. Wafer canja wuri sassa: wafer handling chucks, wafer yankan fayafai, wafer tsaftacewa fayafai, wafer Tantancewar dubawa tsotsa kofuna.
3. LED / LCD lebur panel nuni masana'antu: yumbu bututun ƙarfe, yumbu nika Disc, LIFT PIN, PIN dogo.
4. Sadarwar gani, masana'antar hasken rana: bututun yumbu, sandunan yumbu, allon allon buguwar yumbu scrapers.
5. Abubuwan da ke jurewa zafi da na lantarki: bearings yumbu.
A halin yanzu, aluminum oxide yumbu za a iya raba zuwa babban tsarki da na kowa tukwane.Babban tsarkakken aluminum oxide tukwane jerin yana nufin kayan yumbu mai ɗauke da fiye da 99.9% Al₂O₃.Saboda yanayin zafinsa na har zuwa 1650 - 1990 ° C da tsawon watsawar sa na 1 ~ 6μm, yawanci ana sarrafa shi cikin gilashin fused maimakon platinum crucible: wanda za'a iya amfani dashi azaman bututun sodium saboda isar da haske da juriya ga lalata. karfe alkali.A cikin masana'antar lantarki, ana iya amfani da shi azaman babban abin rufe fuska don abubuwan IC.Dangane da abubuwan da ke ciki daban-daban na aluminum oxide, ana iya raba jerin yumbu na alkama na yau da kullun zuwa yumbu 99, yumbu 95, yumbu 90 da yumbu 85.Wani lokaci, yumbu tare da 80% ko 75% na aluminum oxide kuma ana rarraba su azaman jerin yumbu oxide na gama gari.Daga cikin su, 99 aluminum oxide yumbu kayan da ake amfani da su samar da high-zazzabi crucible, wuta proofing bututu da kuma musamman jurewa kayan, kamar yumbu bearings, yumbu seals da bawul faranti.95 yumbura aluminium ana amfani da shi azaman ɓangaren jure lalacewa.85 yumbu sau da yawa ana haɗewa a wasu kaddarorin, don haka inganta aikin lantarki da ƙarfin injina.Yana iya amfani da molybdenum, niobium, tantalum da sauran karfen karfe, wasu kuma ana amfani da su azaman na'urorin injin lantarki.
| Abun inganci (Ƙimar Wakili) | Sunan samfur | Saukewa: AES-12 | Saukewa: AES-11 | Saukewa: AES-11C | AES-11F | AES-22S | AES-23 | AL-31-03 | |
| Haɗin Kemikal Low-Sodium Sauƙaƙe Samfurin Sintering | H₂O | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| LOl | % | 0.1 | 0.2 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | |
| Fe₂0₃ | % | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 | |
| SiO₂ | % | 0.03 | 0.03 | 0.03 | 0.03 | 0.02 | 0.04 | 0.04 | |
| Na ₂O | % | 0.04 | 0.04 | 0.04 | 0.04 | 0.02 | 0.04 | 0.03 | |
| MgO* | % | - | 0.11 | 0.05 | 0.05 | - | - | - | |
| Farashin 0₃ | % | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | 99.9 | |
| Matsakaici Barbashi Diamita (MT-3300, hanyar nazarin Laser) | μm | 0.44 | 0.43 | 0.39 | 0.47 | 1.1 | 2.2 | 3 | |
| Girman Crystal | μm | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 ~ 1.0 | 0.3 ~ 4 | 0.3 ~ 4 | |
| Ƙirƙirar Ƙarfi** | g/cm³ | 2.22 | 2.22 | 2.2 | 2.17 | 2.35 | 2.57 | 2.56 | |
| Matsakaicin Matsala** | g/cm³ | 3.88 | 3.93 | 3.94 | 3.93 | 3.88 | 3.77 | 3.22 | |
| Rage ƙimar Layin Sintering** | % | 17 | 17 | 18 | 18 | 15 | 12 | 7 | |
* MgO baya cikin lissafin tsarkin Al₂O₃.
* Babu foda mai sikelin 29.4MPa (300kg/cm²), zafin zafin jiki shine 1600 ° C.
AES-11 / 11C / 11F: Ƙara 0.05 ~ 0.1% MgO, sinterability yana da kyau kwarai, don haka yana dacewa da yumbu oxide aluminum tare da tsabta fiye da 99%.
AES-22S: Siffata ta babban ƙira mai yawa da ƙarancin raguwar layin sintering, ana aiwatar da simintin simintin simintin gyare-gyare da sauran manyan samfuran tare da daidaiton girman da ake buƙata.
AES-23 / AES-31-03: Yana da mafi girma kafa yawa, thixotropy da ƙananan danko fiye da AES-22S.na farko ana amfani da su ne don yumbu yayin da ake amfani da na ƙarshe a matsayin mai rage ruwa don kayan hana wuta, samun shahara.
♦ Silicon Carbide (SiC) Halayen
| Halayen Gabaɗaya | Tsaftar manyan abubuwa (wt%) | 97 | |
| Launi | Baki | ||
| Girma (g/cm³) | 3.1 | ||
| Sha ruwa (%) | 0 | ||
| Halayen injina | Ƙarfin sassauƙa (MPa) | 400 | |
| Matasa modules (GPa) | 400 | ||
| Vickers hardness (GPa) | 20 | ||
| Halayen thermal | Matsakaicin zafin aiki (°C) | 1600 | |
| Ƙididdigar faɗaɗawar thermal | RT~500C | 3.9 | |
| (1/°C x 10-6) | RT~800C | 4.3 | |
| Ƙunƙarar zafin jiki (W/m x K) | 130 110 | ||
| Juriyar girgiza zafin zafi ΔT (°C) | 300 | ||
| Halayen Lantarki | Adadin juriya | 25°C | 3 x106 |
| 300°C | - | ||
| 500°C | - | ||
| 800°C | - | ||
| Dielectric akai-akai | 10GHz | - | |
| Asarar Dielectric (x 10-4) | - | ||
| Factor Q (x 104) | - | ||
| Dielectric rushewar ƙarfin lantarki (KV/mm) | - | ||
♦ Silicon Nitride Ceramic
| Kayan abu | Naúrar | Si₃N₄ |
| Hanyar Haɗawa | - | Matsalolin iskar Gas ya Rage |
| Yawan yawa | g/cm³ | 3.22 |
| Launi | - | Dark Grey |
| Yawan Sha Ruwa | % | 0 |
| Matashi Modul | Gpa | 290 |
| Vickers Hardness | Gpa | 18-20 |
| Ƙarfin Ƙarfi | Mpa | 2200 |
| Lankwasawa Ƙarfin | Mpa | 650 |
| Thermal Conductivity | W/mK | 25 |
| Juriya Shock Thermal | Δ (°C) | 450-650 |
| Matsakaicin Yanayin Aiki | °C | 1200 |
| Juyin Juriya | Ω · cm | > 10 ^ 14 |
| Dielectric Constant | - | 8.2 |
| Ƙarfin Dielectric | kV/mm | 16 |