A fannin kera semiconductor, na'urar daukar hoto babbar na'ura ce da ke tantance daidaiton guntu, kuma tushen granite, tare da halaye da yawa, ya zama muhimmin sashi na na'urar daukar hoto.
Kwanciyar hankali: "Garkuwa" daga Canjin Zafin Jiki
Idan injin daukar hoto yana aiki, yana samar da zafi mai yawa. Ko da canjin zafin jiki na 0.1℃ kawai na iya haifar da nakasa ga kayan aikin kuma yana shafar daidaiton daukar hoto. Matsakaicin faɗaɗa zafin granite yana da ƙasa sosai, 4-8 × 10⁻⁶/℃ kawai, wanda yake kusan 1/3 na ƙarfe da 1/5 na ƙarfen aluminum. Wannan yana bawa tushen granite damar kiyaye daidaiton girma lokacin da injin daukar hoto ke aiki na dogon lokaci ko lokacin da yanayin zafi na muhalli ya canza, yana tabbatar da daidaiton abubuwan gani da tsarin injiniya.
Babban aikin hana girgiza: "Soso" wanda ke shan girgiza
A masana'antar semiconductor, aikin kayan aiki da ke kewaye da shi da kuma motsin mutane duk na iya haifar da girgiza. Granite yana da yawan yawa da kuma yanayin tauri, kuma yana da kyawawan halayen damshi, tare da rabon damshi sau 2 zuwa 5 na ƙarfe. Lokacin da aka aika girgizar waje zuwa tushen granite, gogayya tsakanin lu'ulu'u na ma'adinai na ciki yana canza kuzarin girgiza zuwa makamashin zafi don wargajewa, wanda zai iya rage girgizar sosai cikin ɗan gajeren lokaci, yana bawa na'urar photolithography damar dawo da kwanciyar hankali cikin sauri da kuma guje wa duhu ko rashin daidaiton tsarin photolithography saboda girgiza.
Kwanciyar hankali a fannin sinadarai: "Mai Kula" da Muhalli Mai Tsabta
Cikin injin daukar hoto yana haɗuwa da sinadarai daban-daban, kuma kayan ƙarfe na yau da kullun suna iya yin tsatsa ko sakin barbashi. Granite ya ƙunshi ma'adanai kamar quartz da feldspar. Yana da kaddarorin sinadarai masu ƙarfi da juriya ga tsatsa. Bayan an jiƙa shi da maganin acid da alkali, tsatsa a saman yana da ƙanƙanta sosai. A halin yanzu, tsarinsa mai yawa yana haifar da kusan babu tarkace ko ƙura, yana biyan buƙatun mafi girman ƙa'idodin ɗakin tsaftacewa kuma yana rage haɗarin gurɓatar wafer.
Tsarin daidaitawa: "Kayan aiki mafi kyau" don ƙirƙirar ma'auni masu ma'ana
Ana buƙatar a sanya manyan sassan injin photolithography a kan wani wuri mai ma'ana sosai. Tsarin ciki na granite iri ɗaya ne kuma yana da sauƙin sarrafa shi zuwa babban daidaito ta hanyar niƙa, gogewa da sauran dabaru. Tsayinsa na iya kaiwa ≤0.5μm/m, kuma tsantsin saman Ra shine ≤0.05μm, wanda ke ba da tushen shigarwa daidai ga abubuwan da aka haɗa kamar ruwan tabarau na gani.
Tsawon rai da kuma ba tare da kulawa ba: "Kayan aiki masu kaifi" don rage farashi
Idan aka kwatanta da kayan ƙarfe waɗanda ke iya gajiya da fashewa bayan amfani na dogon lokaci, granite ba ya fuskantar lalacewar filastik ko karyewa a ƙarƙashin nauyin da aka saba, kuma ba ya buƙatar maganin saman, don haka yana guje wa haɗarin barewar shafi da gurɓatawa. A aikace, bayan an yi amfani da shi tsawon shekaru, manyan alamun aiki na tushen granite har yanzu suna iya kasancewa cikin kwanciyar hankali, wanda ke rage farashin aiki da kulawa na kayan aiki.
Daga kwanciyar hankali na zafi, juriya ga girgiza zuwa rashin kuzarin sinadarai, halaye da yawa na tushen granite sun cika buƙatun injin photolithography. Yayin da tsarin kera guntu ke ci gaba da haɓaka zuwa mafi daidaito, tushen granite zai ci gaba da taka rawa ba tare da maye gurbinsa ba a fannin kera semiconductor.
Lokacin Saƙo: Mayu-20-2025