A cikin masana'anta na semiconductor, na'urar daukar hoto shine na'ura mai mahimmanci wanda ke ƙayyade madaidaicin kwakwalwan kwamfuta, kuma granite tushe, tare da halayensa da yawa, ya zama wani abu mai mahimmanci na injin photolithography.
Kwanciyar zafi: "Garkuwa" da Canjin Zazzabi
Lokacin da injin daukar hoto yana aiki, yana haifar da babban adadin zafi. Ko da canjin zafin jiki na 0.1 ℃ kawai na iya haifar da nakasawa na kayan aikin kuma yana shafar daidaiton hoto. Matsakaicin haɓakar haɓakar thermal na granite yana da ƙarancin ƙarancin ƙarfi, kawai 4-8 × 10⁻⁶ / ℃, wanda shine kusan 1/3 na na ƙarfe da 1/5 na na aluminium gami. Wannan yana ba da damar granite tushe don kula da kwanciyar hankali lokacin da injin photolithography ke aiki na dogon lokaci ko lokacin da yanayin yanayin muhalli ya canza, yana tabbatar da daidaitattun abubuwan abubuwan gani da tsarin injina.
Babban aikin anti-vibration: "soso" mai ɗaukar girgiza
A cikin masana'antar semiconductor, aikin kayan aiki da ke kewaye da motsin mutane na iya haifar da girgiza. Granite yana da girma mai yawa da rubutu mai wuya, kuma yana da kyawawan kaddarorin damping, tare da damping rabo sau 2 zuwa 5 na karafa. Lokacin da aka watsar da girgizar waje zuwa tushe na granite, rikice-rikice tsakanin lu'ulu'u na ma'adinai na ciki yana canza makamashin girgizawa zuwa makamashi mai zafi don tarwatsewa, wanda zai iya rage rawar jiki a cikin ɗan gajeren lokaci, ƙyale na'urar daukar hoto don dawo da kwanciyar hankali da sauri kuma guje wa ɓarna ko rashin daidaituwa na tsarin photolithography saboda rawar jiki.
Tsabtace sinadaran: "Mai tsaro" na Muhalli mai Tsafta
Ciki na na'urar daukar hoto yana zuwa cikin hulɗa da kafofin watsa labaru daban-daban, kuma kayan ƙarfe na yau da kullun suna da haɗari ga lalata ko sakin barbashi. Granite ya ƙunshi ma'adanai irin su quartz da feldspar. Yana da barga sinadarai Properties da karfi lalata juriya. Bayan da aka jiƙa a cikin maganin acid da alkali, lalatawar saman yana da ƙananan ƙananan. A halin yanzu, ƙaƙƙarfan tsarinsa yana haifar da kusan babu tarkace ko ƙura, yana biyan buƙatun mafi girman ƙa'idodin ɗaki mai tsabta da rage haɗarin gurɓataccen wafer.
Gudanar da daidaitawa: "Madaidaicin abu" don ƙirƙirar madaidaitan ma'auni
Ana buƙatar shigar da ainihin abubuwan da ke cikin na'urar daukar hoto a kan madaidaicin wuri mai mahimmanci. Tsarin ciki na granite daidai ne kuma yana da sauƙin sarrafa shi zuwa madaidaicin madaidaici ta hanyar niƙa, gogewa da sauran dabaru. Its flatness iya isa ≤0.5μm/m, da kuma surface roughness Ra ne ≤0.05μm, samar da wani madaidaici tushen shigarwa ga aka gyara kamar Tantancewar ruwan tabarau.
Tsawon rayuwa da rashin kulawa: "Kayan aikin kaifi" don rage farashi
Idan aka kwatanta da kayan ƙarfe waɗanda ke da wuyar gajiya da fashewa a kan amfani na dogon lokaci, granite da ƙyar yana fuskantar nakasar filastik ko karyewa a ƙarƙashin nauyin al'ada, kuma baya buƙatar jiyya ta sama, don haka yana guje wa haɗarin kwasfa da gurɓatawa. A aikace-aikace masu amfani, bayan da aka yi amfani da su shekaru da yawa, mahimman alamun aikin granite tushe na iya kasancewa da kwanciyar hankali, rage yawan aiki da kuma kula da kayan aiki.
Daga kwanciyar hankali na thermal, juriya na rawar jiki zuwa rashin ƙarfi na sinadarai, halaye masu yawa na tushen granite daidai sun dace da buƙatun injin photolithography. Yayin da tsarin kera guntu ke ci gaba da haɓaka zuwa daidaito mafi girma, sansanonin granite za su ci gaba da taka rawar da ba za a iya maye gurbinsu ba a fagen masana'antar semiconductor.
Lokacin aikawa: Mayu-20-2025