Auna daidaiton zafin rana na dandamalin granite a cikin kayan aikin awo na semiconductor.

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A fagen masana'antar semiconductor, daidaito shine tsarin rayuwar ingancin samfur da aiki. Semiconductor metering kayan aiki, a matsayin maɓalli na hanyar haɗi don tabbatar da daidaiton samarwa, yana ƙaddamar da kusan tsauraran buƙatu akan kwanciyar hankali na ainihin abubuwan sa. Daga cikin su, dandali na dutsen granite, tare da ingantaccen kwanciyar hankali na thermal, yana taka rawar da ba dole ba a cikin kayan aikin awo na semiconductor. Wannan labarin zai gudanar da bincike mai zurfi game da aikin kwanciyar hankali na thermal na dandamali na granite a cikin kayan aikin metering semiconductor ta ainihin bayanan gwaji. ;
Madaidaitan buƙatun don kwanciyar hankali na thermal na kayan aunawa a masana'antar semiconductor
Tsarin masana'anta na semiconductor yana da matuƙar wahala kuma daidai, kuma faɗin layin da'irar akan guntu ya shiga matakin nanometer. A cikin irin wannan madaidaicin tsari na masana'antu, ko da ɗan canjin zafin jiki na iya haifar da haɓakar zafi da raguwar abubuwan kayan aiki, ta haka yana haifar da kurakuran aunawa. Misali, a cikin tsarin daukar hoto, idan daidaiton ma'aunin na'urar ya karkata da 1 nanometer, zai iya haifar da matsaloli masu tsanani kamar gajerun da'irori ko buɗaɗɗen da'irori a cikin da'irori akan guntu, wanda zai haifar da guntuwar guntu. Dangane da kididdigar bayanan masana'antu, ga kowane 1 ℃ canjin yanayin zafi, dandamalin kayan auna kayan ƙarfe na gargajiya na iya fuskantar canje-canjen girma na nanometer da yawa. Koyaya, masana'antar semiconductor na buƙatar daidaiton ma'auni don sarrafa shi a cikin ± 0.1 nanometers, wanda ke sanya kwanciyar hankali na thermal ya zama maɓalli mai mahimmanci don tantance ko kayan awo na iya biyan buƙatun masana'antar semiconductor. ;

Fa'idodin ka'ida na kwanciyar hankali na thermal na dandamali na granite
Granite, a matsayin nau'in dutse na halitta, yana da ƙaƙƙarfan crystallization na ma'adinai na ciki, tsari mai yawa da daidaituwa, kuma yana da fa'idar yanayin kwanciyar hankali na thermal. Dangane da ƙayyadaddun ƙayyadaddun haɓakar haɓakar thermal, ƙimar haɓakar haɓakar thermal na granite yana da ƙasa sosai, gabaɗaya daga 4.5 zuwa 6.5 × 10⁻⁶/K. Sabanin haka, ƙimar haɓakar haɓakar thermal na kayan ƙarfe na yau da kullun kamar aluminium alloys ya kai 23.8 × 10⁻⁶ / K, wanda shine sau da yawa na granite. Wannan yana nufin cewa a ƙarƙashin yanayin bambancin zafin jiki iri ɗaya, canjin yanayin dandali na granite ya fi ƙanƙanta fiye da na dandalin ƙarfe, wanda zai iya ba da ingantaccen ma'aunin ma'auni don na'urorin ƙididdiga na semiconductor. ;
Bugu da ƙari, tsarin kristal na granite yana ba shi kyakkyawan daidaituwa na yanayin zafi. Lokacin da aikin kayan aiki ya haifar da zafi ko canjin yanayi na yanayi, dandalin granite zai iya kawar da zafi da sauri da kuma a ko'ina, guje wa zafi na gida ko overcooling al'amura, ta yadda yadda ya kamata kiyaye gaba daya zazzabi daidaito na dandali da kuma kara tabbatar da kwanciyar hankali na auna daidaito. ;
Hanya da hanyar ma'aunin kwanciyar hankali na thermal
Domin kimanta daidaitaccen yanayin yanayin zafi na dandalin granite a cikin kayan aikin awo na semiconductor, mun tsara tsarin ma'auni mai tsauri. Zaɓi babban ma'aunin wafer wafer, wanda aka sanye shi da babban dandali mai sarrafa granite. A cikin yanayin gwaji, an daidaita kewayon bambancin zafin jiki na gama gari a cikin masana'antar masana'anta na semiconductor, wato, a hankali dumama daga 20 ℃ zuwa 35 ℃ sannan kuma sanyaya zuwa 20 ℃. Dukkanin tsarin ya ɗauki tsawon sa'o'i 8. ;
A kan dandali na granite na kayan aunawa, ana sanya madaidaicin madaidaicin siliki wafers, kuma ana amfani da na'urori masu auna firikwensin tare da daidaiton nanoscale don saka idanu canjin matsayi na dangi tsakanin wafern silicon da dandamali a ainihin lokacin. A halin yanzu, ana shirya na'urori masu auna zafin jiki da yawa a wurare daban-daban akan dandamali don saka idanu akan rarraba zafin jiki a saman dandamali. A yayin gwajin, an rubuta bayanan ƙaura da bayanan zafin jiki kowane minti 15 don tabbatar da cikar da daidaiton bayanai. ;
Bayanan da aka auna da bincike na sakamako
Dangantaka tsakanin canjin zafin jiki da canje-canjen girman dandamali
Bayanan gwaje-gwaje sun nuna cewa lokacin da zafin jiki ya tashi daga 20 ℃ zuwa 35 ℃, canjin girman girman dandali na granite kadan ne. Bayan ƙididdigewa, a cikin duk tsarin dumama, matsakaicin faɗaɗa layin layi na dandamali shine kawai 0.3 nanometer, wanda yayi ƙasa da kewayon haƙurin kuskure don daidaiton aunawa a cikin ayyukan masana'antar semiconductor. A lokacin lokacin sanyi, girman dandamali na iya kusan komawa zuwa yanayin farko, kuma ana iya yin watsi da abin mamaki na girman girman. Wannan sifa ta kiyaye ƙananan canje-canjen ma'auni ko da a ƙarƙashin mahimmin canjin yanayin zafi yana tabbatar da fitaccen yanayin yanayin zafi na dandalin granite. ;
Binciken daidaiton yanayin zafi a saman dandamali
Bayanan da aka tattara ta na'urar firikwensin zafin jiki ya nuna cewa yayin aiki na kayan aiki da kuma tsarin canjin yanayin zafi, rarraba zafin jiki a saman dandalin granite yana da daidaituwa. Ko da a lokacin mataki lokacin da yawan zafin jiki ya canza sosai, bambancin zafin jiki tsakanin kowane ma'aunin ma'auni a kan dandamali koyaushe ana sarrafa shi a cikin ± 0.1 ℃. Rarraba yawan zafin jiki na Uniform yadda ya kamata yana guje wa gurɓacewar dandamali wanda ya haifar da rashin daidaituwar yanayin zafi, yana tabbatar da kwanciyar hankali da kwanciyar hankali na ma'aunin ma'auni, da samar da ingantaccen yanayin auna don kayan aikin awo na semiconductor. ;
Idan aka kwatanta da dandamali na kayan gargajiya
An kwatanta bayanan da aka auna na dandalin granite tare da na'urori masu auna sigina na nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'i nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'in nau'i nau'in nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i nau'i) ta amfani da dandamali na aluminum, kuma bambance-bambancen sun kasance masu mahimmanci. A ƙarƙashin yanayin canjin yanayin zafi guda ɗaya, faɗaɗa madaidaiciyar dandamalin allo na aluminum ya kai nanometer 2.5, wanda ya ninka sau takwas fiye da na dandalin granite. A halin yanzu, rarrabawar zafin jiki a saman dandamalin gami na aluminum bai dace ba, tare da matsakaicin matsakaicin zafin jiki wanda ya kai 0.8 ℃, yana haifar da nakasu a fili na dandamali kuma yana shafar daidaiton aunawa. ;
A cikin madaidaicin duniya na kayan aikin awo na semiconductor, dandamali na granite, tare da ingantaccen yanayin yanayin zafi, sun zama babban jigon tabbatar da daidaiton aunawa. Bayanan da aka auna suna tabbatar da ƙwaƙƙwaran aikin dandali na granite a cikin amsa ga canje-canjen zafin jiki, samar da ingantaccen goyon bayan fasaha ga masana'antun masana'antu na semiconductor. Kamar yadda matakan masana'antu na semiconductor ke ci gaba zuwa daidaici mafi girma, fa'idar kwanciyar hankali ta thermal na dandamalin granite zai ƙara yin fice, yana ci gaba da haɓaka sabbin fasahohi da haɓaka masana'antu.