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A cikin masana'antar semiconductor, binciken wafer shine hanyar haɗi mai mahimmanci don tabbatar da inganci da aikin guntu, kuma daidaito da kwanciyar hankali na teburin dubawa suna taka muhimmiyar rawa a cikin sakamakon ganowa. Tushen Granite tare da halayensa na musamman, ya zama mafi kyawun zaɓi don teburin dubawa na wafer semiconductor, mai zuwa daga bincike mai girma da yawa a gare ku. ;
Na farko, madaidaicin girman garanti
1. Ultra-high flatness da straightness: Ana sarrafa tushe na granite ta hanyar fasaha na fasaha na zamani, kuma ɗakin kwana zai iya kaiwa ± 0.001mm / m ko ma mafi girma daidaito, kuma madaidaiciya kuma yana da kyau. A cikin tsarin dubawa na wafer, babban madaidaicin jirgin sama yana ba da goyon baya ga kwanciyar hankali ga wafer kuma yana tabbatar da daidaitaccen lamba tsakanin bincike na kayan aikin dubawa da kayan haɗin gwal a kan farfajiyar wafer. ;
2. Very low coefficient na thermal fadada: semiconductor masana'antu ne m ga zazzabi canje-canje, da kuma coefficient na thermal fadada granite ne musamman low, yawanci game da 5 × 10⁻⁶ / ℃. Lokacin da dandamalin ganowa ke gudana, ko da yanayin yanayin yanayi ya canza, girman ginin granite yana canzawa kadan. Alal misali, a cikin yanayin zafi mai zafi a lokacin rani, yawan zafin jiki na dandalin gano karfe na yau da kullum zai iya haifar da matsayi na dangi na wafer da kayan aikin ganowa don canzawa, yana rinjayar daidaiton ganewa; Dandalin gano tushen granite zai iya kiyaye kwanciyar hankali, tabbatar da daidaiton matsayi na dangi na wafer da kayan aikin ganowa yayin aikin ganowa, da kuma samar da yanayin kwanciyar hankali don gano madaidaici. ;
Na biyu, girman kwanciyar hankali
1. Tsarin tsayayyen tsari da juriya na girgiza: Granite bayan miliyoyin shekaru na tafiyar matakai na geological, tsarin ciki yana da yawa kuma yana da daidaituwa. A cikin hadadden yanayi na masana'antar semiconductor, girgizar da aka haifar ta hanyar aiki na kayan aiki da ma'aikatan da ke tafiya a kusa da su ana rage su da kyau ta hanyar granite tushe. ;
2. Daidaitaccen amfani na dogon lokaci: idan aka kwatanta da sauran kayan, granite yana da tsayin daka, ƙarfin juriya mai ƙarfi, kuma taurin Mohs zai iya kaiwa 6-7. Ba a samun sauƙin sawa saman dutsen dutse a lokacin ɗora wafer akai-akai, saukewa da ayyukan dubawa. Dangane da ainihin amfani da kididdigar bayanai, yin amfani da teburin gwajin dutsen dutse, ci gaba da aiki bayan sa'o'i 5000, ana iya kiyaye kwanciyar hankali da daidaiton daidaito a sama da 98% na daidaiton farko, rage kayan aiki saboda lalacewa na tushe da ya haifar da lokacin daidaitawa na yau da kullun da lokutan kulawa, rage farashin aiki na kasuwanci, don tabbatar da kwanciyar hankali na dogon lokaci na aikin gwaji. ;
Na uku, girman tsafta da tsangwama
1. Ƙarƙashin ƙurar ƙura: yanayin masana'antu na semiconductor yana buƙatar zama mai tsabta sosai, kuma kayan granite da kansa yana da kwanciyar hankali kuma ba shi da sauƙi don samar da ƙurar ƙura. A lokacin da ake aiki da dandalin gwajin, ƙurar da tushen ke haifarwa ana gujewa don gurɓata wafer, kuma haɗarin gajeriyar kewayawa da buɗaɗɗen da'ira da ƙurar ƙura ke haifarwa yana raguwa. A cikin yankin binciken wafer na bitar mara ƙura, ƙurar ƙura a kusa da teburin binciken granite koyaushe ana sarrafa shi zuwa ƙaramin ƙaramin matakin, yana biyan buƙatun tsabta na masana'antar semiconductor. ;
2. Babu tsangwama na maganadisu: kayan aikin ganowa suna kula da yanayin lantarki, kuma granite abu ne wanda ba na magana ba, wanda ba zai tsoma baki tare da siginar lantarki na kayan ganowa ba. A cikin amfani da gano katako na lantarki da sauran fasahohin gwaji waɗanda ke buƙatar matsanancin yanayi na lantarki, tushen granite yana tabbatar da ingantaccen watsa siginar lantarki na kayan ganowa kuma yana tabbatar da daidaiton sakamakon gwajin. Misali, lokacin da aka gwada wafer don ingantaccen aikin lantarki, tushen granite wanda ba na maganadisu ba yana guje wa tsangwama tare da siginar ganowa na yanzu da ƙarfin lantarki, ta yadda bayanan ganowa da gaske suna nuna halayen lantarki na wafer.
Lokacin aikawa: Maris-31-2025