A yau, tare da saurin ci gaban masana'antar semiconductor, gwajin IC, azaman hanyar haɗi mai mahimmanci don tabbatar da aikin kwakwalwan kwamfuta, daidaito da kwanciyar hankali kai tsaye suna shafar ƙimar amfanin kwakwalwan kwamfuta da gasa na masana'antu. Yayin da tsarin kera guntu ke ci gaba da ci gaba zuwa 3nm, 2nm har ma da ƙarin ci gaba nodes, buƙatun ainihin abubuwan da ke cikin kayan gwajin IC suna ƙara tsauri. Tushen Granite, tare da ƙayyadaddun kayansu na musamman da fa'idodin aiki, sun zama "abokin haɗin gwiwa na zinare" wanda babu makawa don kayan gwajin IC. Wane dabaru na fasaha ne ke bayan wannan?
I. "Rashin iya jurewa" Tushen Gargajiya
A yayin aikin gwajin IC, kayan aikin suna buƙatar gano daidai aikin lantarki na fitattun guntu, amincin sigina, da sauransu a nanoscale. Koyaya, sansanonin ƙarfe na gargajiya (kamar simintin ƙarfe da ƙarfe) sun fallasa matsaloli da yawa a aikace-aikace masu amfani.
A daya hannun, da coefficient na thermal fadada karfe kayan ne in mun gwada da high, yawanci sama da 10×10⁻⁶/℃. Zafin da aka haifar yayin aikin kayan gwajin IC ko ma ƴan canje-canje a yanayin zafin jiki na iya haifar da haɓakar zafin jiki mai mahimmanci da raguwar tushe na ƙarfe. Misali, simintin simintin ƙarfe mai tsayin mita 1 na iya faɗaɗa da kwangila har zuwa 100μm lokacin da zafin jiki ya canza da 10℃. Irin waɗannan canje-canje masu girma sun isa su daidaita binciken gwajin tare da fitattun guntu, wanda ke haifar da mummunan hulɗa da kuma haifar da murdiya na bayanan gwajin.
A gefe guda, aikin damping na tushe na karfe ba shi da kyau, yana da wuya a yi sauri cinye makamashin girgizar da aikin kayan aiki ya haifar. A cikin yanayin gwajin sigina mai girma, ci gaba da micro-oscillation zai gabatar da babban adadin amo, yana ƙara kuskuren gwajin ingancin siginar fiye da 30%. Bugu da ƙari, kayan ƙarfe suna da babban haɗari na maganadisu kuma suna da wuyar haɗuwa tare da siginar lantarki na kayan gwaji, wanda ke haifar da asarar eddy a halin yanzu da tasirin hysteresis, wanda ke tsoma baki tare da daidaito na daidaitattun ma'auni.
Ii. "Ƙarfin Hardcore" na Granite Bases
Ƙarshen kwanciyar hankali na thermal, aza harsashi don ma'auni daidai
Granite yana samuwa ta hanyar haɗakar lu'ulu'u na ma'adinai kamar ma'adini da feldspar ta hanyar ionic da covalent bond. Its coefficient na thermal fadada shi ne musamman low, kawai 0.6-5×10⁻⁶/℃, wanda shi ne kamar 1/2-1/20 na cewa na karfe kayan. Ko da yanayin zafi ya canza da 10 ℃, fadadawa da raguwar ginin dutsen mai tsayin mita 1 bai wuce 50nm ba, yana kusan samun "lalacewar sifili". A halin yanzu, da thermal conductivity na granite ne kawai 2-3 W / (m · K), wanda shi ne kasa da 1/20 na na karafa. Zai iya hana yanayin zafi na kayan aiki yadda ya kamata, kiyaye yanayin zafin jiki na tushe, kuma tabbatar da cewa binciken gwajin da guntu koyaushe suna kula da matsayi na dindindin.
2. Super ƙarfi mai ƙarfi danniya yana haifar da ingantaccen yanayin gwaji
Lalacewar kristal na musamman da tsarin zamiya mai iyaka na hatsi a cikin granite yana ba shi ƙarfi mai ƙarfi mai ƙarfi, tare da damping rabo har zuwa 0.3-0.5, wanda ya ninka fiye da sau shida na tushe na ƙarfe. Bayanan gwaji sun nuna cewa a ƙarƙashin motsin motsi na 100Hz, lokacin girgiza girgizar tushe na granite shine kawai 0.1 seconds, yayin da na simintin ƙarfe shine 0.8 seconds. Wannan yana nufin cewa granite tushe na iya nan da nan kashe girgizar da aka haifar ta hanyar farawa da kashe kayan aiki, tasirin waje, da dai sauransu, kuma yana sarrafa girman girgizar dandalin gwajin a cikin ± 1μm, yana ba da garanti mai ƙarfi don sakawa na nanoscale bincike.
3. Halitta anti-magnetic Properties, kawar da electromagnetic tsangwama
Granite abu ne na diamagnetic tare da raunin maganadisu na kusan -10 ⁻. Na'urorin lantarki na ciki suna wanzuwa bi-biyu a cikin haɗin sinadarai kuma kusan ba a taɓa yin su ta hanyar filayen maganadisu na waje ba. A cikin yanayin filin maganadisu mai ƙarfi na 10mT, ƙarfin filin maganadisu da aka jawo akan saman granite bai kai 0.001mT ba, yayin da saman simintin ƙarfe ya kai sama da 8mT. Wannan kayan anti-magnetic na halitta na iya ƙirƙirar yanayi mai tsabta don kayan gwajin IC, yana kare shi daga tsangwama na lantarki na waje kamar injinan bita da siginar RF. Ya dace musamman don yanayin gwaji waɗanda ke da matuƙar kula da hayaniyar lantarki, kamar guntuwar ƙira da madaidaicin ADCs/Dacs.
Na uku, aikace-aikacen aikace-aikacen ya sami sakamako na ban mamaki
Ayyukan masana'antun semiconductor da yawa sun nuna cikakkiyar ƙimar sansanonin granite. Bayan sanannen masana'antar gwajin kayan aikin semiconductor na duniya ya karɓi tushe mai tushe a cikin babban dandamalin gwajin guntu na 5G, ya sami sakamako mai ban mamaki: daidaiton matsayi na katin binciken ya karu daga ± 5μm zuwa ± 1μm, daidaitaccen karkatar da bayanan gwajin ya ragu da 70%, kuma rashin yanke hukunci na gwajin guda ɗaya ya ragu sosai.0.0.0%. A halin yanzu, tasirin kashe jijjiga yana da ban mamaki. Kayan aikin na iya fara gwajin ba tare da jiran girgizar ta ruɓe ba, yana rage jujjuyawar gwajin guda ɗaya da kashi 20% da haɓaka ƙarfin samarwa na shekara-shekara ta sama da wafers miliyan 3. Bugu da ƙari, ginin granite yana da tsawon rayuwa fiye da shekaru 10 kuma yana buƙatar kulawa akai-akai. Idan aka kwatanta da sansanonin ƙarfe, gabaɗayan kuɗin sa ya ragu da fiye da 50%.
Na hudu, daidaita da yanayin masana'antu da jagoranci haɓaka fasahar gwaji
Tare da haɓaka fasahar marufi na ci gaba (kamar Chiplet) da haɓakar filayen da ke tasowa kamar kwakwalwan kwamfuta na ƙididdigewa, buƙatun aikin na'urar a gwajin IC za su ci gaba da tashi. Tushen Granite kuma koyaushe suna haɓakawa da haɓakawa. Ta hanyar jiyya na rufi don haɓaka juriya ko ta hanyar haɗawa da yumbu na piezoelectric don cimma ramuwa mai ƙarfi da sauran ci gaban fasaha, suna motsawa zuwa madaidaiciyar jagora mai hankali. A nan gaba, ginin dutsen zai ci gaba da kiyaye fasahar kere-kere na masana'antar semiconductor da ingantaccen ci gaba na "chips na kasar Sin" tare da yin fice.
Zaɓin tushe na granite yana nufin zabar ingantaccen, tsayayye da ingantaccen gwajin gwajin IC. Ko gwajin guntu na ci gaba na yanzu ko bincike na fasaha na zamani na gaba, tushen granite zai taka rawar da ba za a iya maye gurbinsa ba.
Lokacin aikawa: Mayu-15-2025