A yau, tare da saurin ci gaban masana'antar semiconductor, gwajin IC, a matsayin muhimmiyar hanyar haɗi don tabbatar da aikin kwakwalwan kwamfuta, daidaito da kwanciyar hankali suna shafar ƙimar yawan amfani da kwakwalwan kwamfuta da kuma gasa a masana'antar. Yayin da tsarin kera guntu ke ci gaba da ci gaba zuwa 3nm, 2nm da ma ƙarin ci gaba, buƙatun abubuwan da ke cikin kayan aikin gwaji na IC suna ƙara zama masu tsauri. Tushen dutse, tare da halayen kayansu na musamman da fa'idodin aiki, sun zama "abokin tarayya na zinare" mai mahimmanci ga kayan aikin gwaji na IC. Wane dabaru na fasaha ke bayan wannan?
I. "Rashin Iya Jurewa" na Tushen Gargajiya
A lokacin gwajin IC, kayan aikin suna buƙatar gano ainihin aikin wutar lantarki na fil ɗin guntu, amincin sigina, da sauransu a sikelin nano. Duk da haka, tushen ƙarfe na gargajiya (kamar ƙarfe da ƙarfe) sun fallasa matsaloli da yawa a aikace-aikacen aikace-aikace.
A gefe guda, yawan faɗaɗa zafin da kayan ƙarfe ke yi yana da yawa, yawanci sama da 10×10⁻⁶/℃. Zafin da ake samarwa yayin aikin kayan gwajin IC ko ma ƙananan canje-canje a yanayin zafi na iya haifar da faɗaɗa zafi da matsewar tushen ƙarfe. Misali, tushen ƙarfe mai tsawon mita 1 zai iya faɗaɗawa da matsewa har zuwa 100μm lokacin da zafin ya canza da 10℃. Irin waɗannan canje-canjen girma sun isa su daidaita binciken gwajin da filolin guntu, wanda ke haifar da mummunan hulɗa da kuma haifar da gurɓatar bayanan gwajin.
A gefe guda kuma, aikin rage ƙarfin ƙarfe ba shi da kyau, wanda hakan ke sa ya yi wuya a cinye kuzarin girgiza da aikin kayan aikin ya samar cikin sauri. A cikin yanayin gwajin sigina mai yawan mita, ci gaba da ƙara yawan hayaniya zai haifar da hayaniya mai yawa, wanda ke ƙara kuskuren gwajin ingancin sigina da fiye da 30%. Bugu da ƙari, kayan ƙarfe suna da babban ƙarfin maganadisu kuma suna iya haɗuwa da siginar lantarki na kayan aikin gwaji, wanda ke haifar da asarar wutar lantarki da tasirin hysteresis, wanda ke kawo cikas ga daidaiton ma'auni daidai.
Ii. "Ƙarfin Hardcore" na Tushen Granite
Kwanciyar hankali ta ƙarshe, shimfida harsashin ma'auni daidai
Ana samar da dutse ta hanyar haɗakar lu'ulu'u masu ƙarfi na ma'adanai kamar quartz da feldspar ta hanyar haɗin ionic da covalent. Matsakaicin faɗaɗa zafinsa yana da ƙasa sosai, 0.6-5 × 10⁻⁶/℃ kawai, wanda yake kusan 1/2-1/20 na kayan ƙarfe. Ko da zafin ya canza da 10℃, faɗaɗa da matsewar tushen dutse mai tsawon mita 1 bai kai 50nm ba, kusan ya kai "sifili na lalacewa". A halin yanzu, ƙarfin zafin granite shine 2-3 W/(m · K), wanda bai kai 1/20 na ƙarfe ba. Zai iya hana kwararar zafi na kayan aiki yadda ya kamata, kiyaye yanayin zafin saman tushe iri ɗaya, da kuma tabbatar da cewa gwajin da guntu koyaushe suna riƙe da matsayi na dindindin.
2. Ƙarfin danne girgiza yana haifar da yanayin gwaji mai ɗorewa
Lalacewar kristal ta musamman da tsarin zamewar iyaka na hatsi a cikin granite suna ba shi ƙarfin watsa makamashi mai ƙarfi, tare da rabon damshi har zuwa 0.3-0.5, wanda ya fi sau shida na tushen ƙarfe. Bayanan gwaji sun nuna cewa a ƙarƙashin motsin girgiza na 100Hz, lokacin rage girgiza na tushen granite shine daƙiƙa 0.1 kawai, yayin da na tushen ƙarfen da aka yi simintin shine daƙiƙa 0.8. Wannan yana nufin cewa tushen granite zai iya danne girgizar da kayan aiki suka haifar nan take da kuma rufewa, tasirin waje, da sauransu, da kuma sarrafa girman girgizar dandamalin gwaji a cikin ±1μm, yana ba da garanti mai ƙarfi don sanya na'urorin bincike na nanoscale.
3. Halayen hana maganadisu na halitta, kawar da tsangwama ta hanyar lantarki
Granite abu ne mai kama da diamagnetic wanda ke da sauƙin amsawa ga maganadisu na kimanin -10⁻⁵. Elektron na ciki suna wanzuwa a cikin nau'i-nau'i a cikin haɗin sinadarai kuma kusan ba sa taɓa rabuwa da filayen maganadisu na waje. A cikin yanayin filin maganadisu mai ƙarfi na 10mT, ƙarfin filin maganadisu da aka haifar a saman granite bai wuce 0.001mT ba, yayin da wanda ke kan saman ƙarfe mai siminti ya kai sama da 8mT. Wannan sifar hana maganadisu ta halitta na iya ƙirƙirar yanayin aunawa mai tsabta don kayan aikin gwaji na IC, yana kare shi daga tsangwama na lantarki na waje kamar injinan bita da siginar RF. Ya dace musamman don gwajin yanayi waɗanda ke da matuƙar saurin kamuwa da hayaniyar lantarki, kamar kwakwalwan kwantum da ADCs/Dacs masu inganci.
Na uku, aikace-aikacen da aka yi amfani da su a aikace ya cimma sakamako mai kyau
Ayyukan kamfanonin semiconductor da yawa sun nuna ƙimar tushen granite gaba ɗaya. Bayan da wani sanannen mai kera kayan aikin gwaji na semiconductor a duniya ya ɗauki tushen granite a cikin dandamalin gwajin guntu na 5G mai ƙarfi, ya sami sakamako mai ban mamaki: daidaiton wurin da katin bincike ya kasance ya ƙaru daga ±5μm zuwa ±1μm, daidaitaccen karkacewar bayanan gwaji ya ragu da kashi 70%, kuma ƙimar kuskuren gwaji ɗaya ya ragu sosai daga 0.5% zuwa 0.03%. A halin yanzu, tasirin rage girgiza abin mamaki ne. Kayan aiki na iya fara gwajin ba tare da jira girgizar ta lalace ba, yana rage zagayowar gwaji ɗaya da kashi 20% da kuma ƙara ƙarfin samarwa na shekara-shekara da fiye da wafers miliyan 3. Bugu da ƙari, tushen granite yana da tsawon rai sama da shekaru 10 kuma ba ya buƙatar kulawa akai-akai. Idan aka kwatanta da tushen ƙarfe, jimlar farashinsa ya ragu da fiye da kashi 50%.
Na huɗu, daidaita da yanayin masana'antu da kuma jagorantar haɓaka fasahar gwaji
Tare da haɓaka fasahar marufi ta zamani (kamar Chiplet) da kuma ƙaruwar fannoni masu tasowa kamar kwakwalwan kwamfuta na kwantum, buƙatun aikin na'urori a gwajin IC za su ci gaba da ƙaruwa. Tushen dutse kuma suna ci gaba da ƙirƙira da haɓakawa. Ta hanyar maganin shafa saman don haɓaka juriyar lalacewa ko ta hanyar haɗawa da yumbu na piezoelectric don cimma diyya mai aiki da girgiza da sauran ci gaban fasaha, suna tafiya zuwa ga hanya mafi daidaito da wayo. A nan gaba, tushen dutse zai ci gaba da kare sabbin fasahohin masana'antar semiconductor da haɓaka "kwakwalwan China" mai inganci tare da kyakkyawan aikinta.
Zaɓar tushen granite yana nufin zaɓar mafita mafi inganci, karko da inganci ta gwajin IC. Ko dai gwajin guntu ne na ci gaba na yanzu ko kuma binciken fasahar zamani na gaba, tushen granite zai taka muhimmiyar rawa da ba za a iya maye gurbinsa ba.
Lokacin Saƙo: Mayu-15-2025